@ARTICLE{Boryło_P._THE_2018, author={Boryło, P. and Gołombek, K. and Matus, K. and Lukaszkowicz, K.}, volume={vol. 63}, number={No 1}, journal={Archives of Metallurgy and Materials}, howpublished={online}, year={2018}, publisher={Institute of Metallurgy and Materials Science of Polish Academy of Sciences}, publisher={Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences}, type={Artykuły / Articles}, title={THE MORPHOLOGY AND STRUCTURE OF ZnO THIN FILMS DEPOSITED BY ALD METHOD}, URL={http://journals.pan.pl/Content/103469/PDF/AMM-2018-1-19-Borylo.pdf}, doi={10.24425/118919}, keywords={ALD, ZnO, SEM, TEM, UV/VIS}, }