@ARTICLE{Seo_Minhye_Effect_2019, author={Seo, Minhye and Lee, Soo-Young and Cho, Sung-Su and Song, Hyoung Woon and Kim, Hyun-Kyung and Kim, Dong Soo and Lee, Sungkyu}, volume={vol. 64}, number={No 2}, journal={Archives of Metallurgy and Materials}, pages={695-700}, howpublished={online}, year={2019}, publisher={Institute of Metallurgy and Materials Science of Polish Academy of Sciences}, publisher={Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences}, abstract={Mordenite-zeolite supported Ca-Cu and Ba-Cu catalysts (Ca-Cu/MOR and Ba-Cu MOR) were successfully fabricated for direct decomposition of both NF3 and N2O gases contained in waste gas stream of (semiconductor) electronics industry. N2O conversion rates of Ca-Cu and Ba-Cu catalysts were 79 and 86%, respectively, at 700°C and 1 atm under space velocity of 5000 h–1. The Ca-Cu catalyst was especially noteworthy in that its capability of converting N2O could be maintained even after its exposure to co-feeding NF3 gas constituent in the waste gas stream. Compositional and surface morphological analyses of the Ca-Cu and Ba-Cu catalysts were made before and after exposure to the waste gas stream to examine any noticeable degradation or change of the catalysts. Unlike Ba-Cu catalyst, SiO2 constituent of the Ca-Cu catalyst was found to remain immune to the NF3-cofeeding waste gas stream, casting a positive prospect for superior and steady N2O decomposition performance via maintenance of its structural integrity.}, type={Artykuły / Articles}, title={Effect of NF3 Gas on Stabilization of Alkaline Earth Metal-CU Mordenite Catalysts During N2O Decomposition Reaction}, URL={http://journals.pan.pl/Content/111340/PDF/AMM-2019-2-43-Sungkyu.pdf}, doi={10.24425/amm.2019.127600}, keywords={nitrous oxide (N2O), nitrofluorine three (NF3), perfluorocompounds (PFCs), direct decomposition, catalyst}, }