TY - JOUR L1 - http://journals.pan.pl/Content/103469/PDF/AMM-2018-1-19-Borylo.pdf L2 - http://journals.pan.pl/Content/103469 PY - 2018 IS - No 1 DO - 10.24425/118919 KW - ALD KW - ZnO KW - SEM KW - TEM KW - UV/VIS A1 - Boryło, P. A1 - Gołombek, K. A1 - Matus, K. A1 - Lukaszkowicz, K. PB - Institute of Metallurgy and Materials Science of Polish Academy of Sciences PB - Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences VL - vol. 63 DA - 2018-03-06 T1 - THE MORPHOLOGY AND STRUCTURE OF ZnO THIN FILMS DEPOSITED BY ALD METHOD UR - http://journals.pan.pl/dlibra/publication/edition/103469 T2 - Archives of Metallurgy and Materials ER -