TY - JOUR L1 - http://journals.pan.pl/Content/106426/PDF/173-178_00630_Bpasts_66No2_30.04.18_K.pdf L2 - http://journals.pan.pl/Content/106426 PY - 2018 IS - No 2 (Special Section on Nano- and Micromechanics) EP - 178 KW - ion-sorption micropump KW - MEMS-type micropump KW - gas discharge KW - ionization A1 - Grzebyk, T. A1 - Górecka-Drzazga, A. VL - 66 DA - 2018.04.30 T1 - Characterization of the ionization process inside a miniature glow-discharge micropump SP - 173 UR - http://journals.pan.pl/dlibra/publication/edition/106426 T2 - Bulletin of the Polish Academy of Sciences Technical Sciences ER -