TitleThe Effect of Humidity on the Stability of LTCC Pressure Sensors
Journal titleMetrology and Measurement Systems
Divisions of PASNauki Techniczne
PublisherPolish Academy of Sciences Committee on Metrology and Scientific Instrumentation
ReferencesBirol H. (2007), Fabrication of a millinewton force sensor using low temperature co-fired ceramic (LTCC) technology, Sensors and Actuaors A, 134, 334, doi.org/10.1016/j.sna.2006.05.025 ; Partsch U. (2007), A new concept for LTCC-based pressure sensors, null. ; Zarnik M. (2009), Feasibility study of a thick-film PZT resonant pressure sensor made on a prefired 3D LTCC structure, International journal of applied ceramic technology, 6, 1, 9, doi.org/10.1111/j.1744-7402.2008.02322.x ; Kita J. (2008), Development of LTCC-materials and their application - an overview, Information MIDEM, 38, 4, 219. ; Golonka L. (2006), LTCC microfluidic system, Int. J. Appl. Ceram. Technol, 3, 2, 150, doi.org/10.1111/j.1744-7402.2006.02072.x ; Belavič D. (2008), Capacitive pressure sensors realized with LTCC technology, null, 271. ; Belavič D. (2009), Temperature behaviour of capacitive pressure sensor fabricated with LTCC technology, Information MIDEM, 38, 3, 191. ; Zarnik M. (2010), Information MIDEM, 40, 1, 74. ; Zarnik M. (2011), Design study for a capacitive ceramic pressure sensor, Microelectronics International, 28, 3, 31, doi.org/10.1108/13565361111162602 ; Marghescu C. (2010), FE modeling of capacitive pressure sensor realized in LTCC technology, null. ; Ionescu C. (2009), The design and improvement of LTCC-based capacitive pressure sensors employing finite element analysis, null. ; Zarnik M. (2011), Experimental and numerical study of the humidity and moisture effect on the stability of an air-gap capacitor in a 3D LTCC structure, null, 62. ; Zarnik M. (2009), Investigation of a thick-film capacitive pressure sensor in a three-dimensional LTCC structure, null, 371. ; Zarnik M. (2010), The warm-up and offset stability of a low-pressure piezoresistive ceramic pressure sensor, Sensors and actuators, A, 158, 2, 198, doi.org/10.1016/j.sna.2009.12.035 ; Zarnik M. (2010), Some Critical Steps in the Manufacturing of LTCC-based Pressure Sensors, null, 303.