Title

Construction Of A Piezoelectric-Based Resonance Ceramic Pressure Sensor Designed For High-Temperature Applications

Journal title

Metrology and Measurement Systems

Yearbook

2015

Volume

vol. 22

Numer

No 3

Publication authors

Darko Belavič ; Andraž Bradeško ; Marina Santo Zarnik ; Tadej Rojac

Divisions of PAS

Nauki Techniczne

Publisher

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Date

2015[2015.01.01 AD - 2015.12.31 AD]

Identifier

ISSN 0860-8229

References

Belavič (2014), An overview of LTCC based ceramic microsystems : from simple pressure sensors to complex chemical reactors of EDS Electronic Devices and Systems IMAPS CS International Conference XVI XXI , CD - ROM, Proc, 14. ; Santo Zarnik (2009), Feasibility study of a thick - film PZT resonant pressure sensor made on a prefired LTCC structure of applied ceramic technology, International journal, 6, 9. ; Belavič (2008), Piezoresistive piezoelectric and capacitive pressure sensors Tutorial : Ceramic pressure sensors from materials to devices of th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, Proc. ; Belavič (2007), The application of thick - film technology in C - MEMS, Journal, 19. ; Partsch (2007), A new concept for LTCC - based pressure sensors of rd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies CD - ROM, Proc, 367. ; Belavič (2007), Benchmarking different types of thick - film pressure sensors of rd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies CD - ROM, Proc, 278.

DOI

10.1515/mms-2015-0034