Details

Title

Electron optics column for a new MEMS-type transmission electron microscope

Journal title

Bulletin of the Polish Academy of Sciences: Technical Sciences

Yearbook

2018

Volume

66

Numer

No 2

Authors

Keywords

MEMS ; miniature TEM ; electron emission ; focusing of electron beam ; electron optics column

Divisions of PAS

Nauki Techniczne

Coverage

133-137

Publisher

Polish Academy of Sciences

Date

2018.04.30

Type

Artykuły / Articles

Identifier

ISSN 0239-7528, eISSN 2300-1917

DOI

10.24425/119067

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