Details

Title

A stack multilayer high reflectance optical filter produced on polyester substrate with the PECVD technique

Journal title

Bulletin of the Polish Academy of Sciences: Technical Sciences

Yearbook

2009

Numer

No 2

Publication authors

Divisions of PAS

Nauki Techniczne

Publisher

Polish Academy of Sciences

Date

2009

Identifier

ISSN 0239-7528, eISSN 2300-1917

References

Larouche S. (2004), Microstructure of plasma-deposited SiO<sub>2</sub>/TiO<sub>2</sub> optical films, J. Vac. Sci. Techn, A 22, 4, 1200. ; Gruniger A. (2003), Deposition of SiO<sub>2</sub>-like diffusion barriers on PET and paper by PECVD, Surf. Coat. Techn, 174-175, 1043, doi.org/10.1016/S0257-8972(03)00327-X ; Bieder A. (2005), Deposition of SiO<sub>x</sub> diffusion barriers on flexible packaging materials by PECVD, Surf. Coat. Techn, 200, 928, doi.org/10.1016/j.surfcoat.2005.02.004 ; Martin-Palma R. (2006), Optical and compositional analysis of functional SiO<sub>x</sub>C<sub>y</sub>:H coatings on polymers, Thin Solid Films, 515, 2493, doi.org/10.1016/j.tsf.2006.07.082 ; Masse J. (2006), Stability and effect of annealing on the optical properties of plasma-deposited Ta<sub>2</sub>O<sub>5</sub> and Nb<sub>2</sub>O<sub>5</sub> films, Thin Solid Films, 515, 1674, doi.org/10.1016/j.tsf.2006.05.047 ; Palma R. (2006), Optical and compositional analysis of functional SiO<sub>x</sub>C<sub>y</sub>:H coatings on polymers, Thin Solid Films, 515, 2493. ; Bauer S. (2003), Optical multilayers for ultra-narrow bandpass filters fabricated by PICVD, Thin Solid Films, 442, 189, doi.org/10.1016/S0040-6090(03)00981-7 ; Jaworske D. (1998), Characterization of silicon thin film deposited by e-beam, Thin Solid Films, 332, 30. ; Neuman G. (1997), The use of experimental design techniques to meet reflected color targets in pyrolytic low emissivity coatings, Thin Solid Films, 308-309, 26, doi.org/10.1016/S0040-6090(97)00532-4 ; Eliahou-Niv S. (2006), Design and analysis of a novel tunable optical filter, Microelectr. J, 37, 302, doi.org/10.1016/j.mejo.2005.05.018

DOI

10.2478/v10175-010-0118-z

×