Details

Title

Characterization of the ionization process inside a miniature glow-discharge micropump

Journal title

Bulletin of the Polish Academy of Sciences: Technical Sciences

Yearbook

2018

Volume

66

Numer

No 2

Authors

Keywords

ion-sorption micropump ; MEMS-type micropump ; gas discharge ; ionization

Divisions of PAS

Nauki Techniczne

Coverage

173-178

Date

2018.04.30

DOI

10.24425/122097

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