Details

Title

Conductive atomic force microscope for investigation of thin-film gate insulators

Journal title

Bulletin of the Polish Academy of Sciences: Technical Sciences

Yearbook

2008

Volume

vol. 56

Numer

No 1

Authors

Keywords

AFM ; conductive probe ; thin-film oxides annealing

Divisions of PAS

Nauki Techniczne

Coverage

39-44

Date

2008

Type

Artykuły / Articles
×