Details

Title

Scanning probe microscopy as a metrology method in microand nanostructure investigations

Journal title

Bulletin of the Polish Academy of Sciences: Technical Sciences

Yearbook

2006

Volume

vol. 54

Numer

No 1

Authors

Keywords

scanning probe microscopy ; micro- and nanostructure investigations

Divisions of PAS

Nauki Techniczne

Coverage

19-23

Date

2006

Type

Artykuły / Articles
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