Details

Title

Fabrication of CdMgTe/Cd(Mn)Te nanostructures with the application of high-resolution electron-beam lithography

Journal title

Opto-Electronics Review

Yearbook

2017

Volume

vol. 25

Numer

No 2

Authors

Keywords

Nanopatterning ; Electron beam lithography ; Wet etching ; Side gate

Divisions of PAS

Nauki Techniczne

Coverage

65-68

Publisher

Association of Polish Electrical Engineering and Polish Academy of Sciences in cooperation with Military University of Technology

Date

19.04.2017

Type

Article

Identifier

ISSN 1896-3757
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