Title

Comparative studies of the optical absorption coefficient spectra in the implanted layers in silicon with the use of nondestructive spectroscopic techniques

Journal title

Metrology and Measurement Systems

Yearbook

2020

Volume

vol. 27

Issue

No 2

Authors

Dorywalski, Krzysztof ; Chrobak, Łukasz ; Maliński, Mirosław

Keywords

silicon ; ion implantation ; optical absorption coefficient spectra ; modulated free carrier absorption ; photo thermal radiometry ; ellipsometry ; nondestructive techniques

Divisions of PAS

Nauki Techniczne

Coverage

323-337

Publisher

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Date

2020.06.18

Type

Article

Identifier

DOI: 10.24425/mms.2020.132778

Source

Metrology and Measurement Systems; 2020; vol. 27; No 2; 323-337