Szczegóły

Tytuł artykułu

Vacuum microdevices

Tytuł czasopisma

Bulletin of the Polish Academy of Sciences: Technical Sciences

Rocznik

2012

Numer

No 1 March

Autorzy publikacji

Wydział PAN

Nauki Techniczne

Wydawca

Polish Academy of Sciences

Data

2012

Identyfikator

ISSN 0239-7528, eISSN 2300-1917

Referencje

Vabond Project, "Long-term stability of vacuum-encapsulated MEMS devices using eutectic wafer bonding" <a target="_blank" href='http://www.ist-world.org'>http://www.ist-world.org</a> ; Tsuchiya T. (2003), Polysilicon vibrating gyroscope vacuum-encapsulated in an on-chip micro chamber, Sensors and Actuators A, 90, 49, doi.org/10.1016/S0924-4247(00)00565-3 ; Kleps I. (2001), Study of porous silicon, silicon carbide and DLC coated field emitters for pressure sensor application, Solid-State Electronics, 45, 997, doi.org/10.1016/S0038-1101(01)00148-4 ; Miller S. (2009), MEMS ultra low leak detection methods: a review, Sensor Review, 29, 4, 339, doi.org/10.1108/02602280910986584 ; Randolph S. (2005), A microfabrication process for a vacuum-encapsulated microchamber, Microelectronic Engineering, 77, 412, doi.org/10.1016/j.mee.2005.02.003 ; Page films brochure of SaesGetters Group <a target="_blank" href='http://www.saesgetters.com/'>http://www.saesgetters.com/</a> ; Kowalski P. (2010), A silicon gas micro pump with the piezoelectric driver, Electronics, 6, 81. ; Shamus McNamara (2005), On-Chip vacuum generated by a micromachined Knudsen pump, J. Microelectromechanical Systems, 14, 4, 741, doi.org/10.1109/JMEMS.2005.850718 ; Doms M. (2005), A micromachined vapor jet pump, Sensors and Actuators A, 119, 462, doi.org/10.1016/j.sna.2004.10.016 ; Naik P. (1967), Glass orbitron of 5-cm diameter, J. Vac. Sci. Technol, 5, 42, doi.org/10.1116/1.1492575 ; Wilcox J. (1999), Nasa Tech. Brief, 23, 9, 1. ; Koops H. (2005), A miniaturized Orbitron pump for MEMS applications, Technical Digest 18th Int. Vacuum Nanoelectronics Conf. IV NC, 1, 364.

DOI

10.2478/v10175-012-0004-y

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