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Abstract

Accurate flatness measurement of silicon wafers is affected greatly by the gravity-induced deflection (GID) of the wafers, especially for large and thin wafers. The three-point-support method is a preferred method for the measurement, in which the GID uniquely determined by the positions of the supports could be calculated and subtracted. The accurate calculation of GID is affected by the initial stress of the wafer and the positioning errors of the supports. In this paper, a finite element model (FEM) including the effect of initial stress was developed to calculate GID. The influence of the initial stress of the wafer on GID calculation was investigated and verified by experiment. A systematic study of the effects of positioning errors of the support ball and the wafer on GID calculation was conducted. The results showed that the effect of the initial stress could not be neglected for ground wafers. The wafer positioning error and the circumferential error of the support were the most influential factors while the effect of the vertical positioning error was negligible in GID calculation.
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Abstract

The objective of this paper is to evaluate the self- healing properties of a commercially-available geosynthetic clay liner (GCL) using flexible-wall permeameter. The GCLs are produced by the same factory, but the contents of bentonite are different. Also the hydraulic conductivities (HC) of GCLs with no defect are different. In this study, specimens were completely saturated under the backpressure of 20 kPa before the test. Permeability tests were performed on GCL specimens with penetrating flaw and also on specimens permeated with distilled water and CaCl2 solutions. The test results were presented and discussed. Experimental results showed that the GCL with penetrating flaw did not exhibit complete self-healing in the case of flaw. After 120 days, the hydraulic conductivity increased by approximately an order of magnitude. In addition, CaCl2 solutions had a significant influence on the hydraulic conductivity. The research findings might be of interest to researchers and engineers who design liners for landfills and other liquid containment facilities
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