Results of scientific researches show the trend of active using nitrides and borides of transition

metals and their combination in developing protective materials. While single elements

nitrides have been well studied, their multilayer modifications and combinations require

more detailed study. Physical-mechanical properties and structural-phase state of multilayer

coating according to the deposition conditions is an important task for the study.

It will be the analysis of physical-mechanical and electrical properties of coatings based on

refractory metals nitrides, their structure and phase composition and surface morphology

depending on the parameters of condensation. It was established the structure and behavior

of nano scale coatings based on refractory metals nitrides (Ti, Zr) depending on the size

of nano grains, texture, stress occurring in coatings.