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Abstract

In this work the construction of experimental setup for MEMS/NEMS deflection measurements is presented. The system is based on intensity fibre optic detector for linear displacement sensing. Furthermore the electronic devices: current source for driving the light source and photodetector with wide-band preamplifier are presented.

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Authors and Affiliations

Karolina Orłowska
Michał Świątkowski
Piotr Kunicki
Piotr Słupski
Anna Sankowska
Teodor Gotszalk

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