Scanning electron microscopy (SEM) is a perfect technique for micro-/nano-object imaging [1] and movement measurement [2, 3] both in high and environmental vacuum conditions and at various temperatures ranging from elevated to low temperatures. In our view, the magnetic field expanding from the pole-piece makes it possible to characterize the behaviour of electromagnetic micro- and nano electromechanical systems (MEMS/NEMS) in which the deflection of the movable part is controlled by the electromagnetic force. What must be determined, however, is the magnetic field expanding from the e-beam column, which is a function of many factors, like working distance (WD), magnification and position of the device in relation to the e-beam column. There are only a few experimental methods for determination of the magnetic field in a scanning electron microscope. In this paper we present a method of the magnetic field determination under the scanning electron column by application of a silicon cantilever magnetometer. The micro-cantilever magnetometer is a silicon micro-fabricated MEMS electromagnetic device integrating a current loop of lithographically defined dimensions. Its stiffness can be calibrated with a precision of 5% by the method described by Majstrzyk et al. [4]. The deflection of the magnetometer cantilever is measured with a scanning electron microscope and thus, through knowing the bias current, it is possible to determine the magnetic field generated by the e-beam column in a defined position and at a defined magnification.
The paper presents the results of tests concerning the effect of the extrusion process in the complex strain state on the microstructure and properties of one of magnesium alloy with aluminium, zinc and manganese, designated AZ61. Due to its specific gravity, it is increasingly being used in the automotive and aerospace industries to reduce the weight of structural elements. As a result of plastic deformation processes, rods with a diameter of 8, 6 and 4 mm were obtained from AZ61 magnesium alloy. The microstructure analysis was performed using light and electron microscopy (STEM) techniques in the initial state and after plastic deformation. Microstructure studies were supplemented with a quantitative analysis using the Metilo program. A number of stereological parameters were determined: average diameter of grain, shape factor. A static tensile test was carried out at 250ºC and 300ºC, at deformation rates of 0.01, 0.001 and 0.0001 m·s–1. Better plastic properties after deformation using KoBo method were obtained than with conventional extrusion.