Comparison studies of different measurement methods using a Coordinate Measuring Arm are presented. Studies were divided into two parts. The first was point measurements of contact and pseudo-scanning contact measurements. The second part consisted of point measurements of contact and non-contact scanning measurements. Contact research (point measurements and the pseudo-scanning) were accomplished with the use of PowerINSPECT software, whereas non-contact with use of Focus Handheld and Focus Inspection software. Handheld Focus was used to collect a point cloud and its processing, while the detection of set elements was made using the second software from the group of Focus. According to the developed procedure for both parts sample elements with known nominal values were measured (available CAD model of object of research). It became the basis for examining whether there are statistically significant differences between results of different methods in both parts. Statistical comparison of measurement methods was carried out using four tests: Comparison of Means, Comparison of Standard Deviations, Comparison of Medians and a Kolmogorov- Smirnov Test.

Scanning electron microscopy (SEM) is a perfect technique for micro-/nano-object imaging [1] and movement measurement [2, 3] both in high and environmental vacuum conditions and at various temperatures ranging from elevated to low temperatures. In our view, the magnetic field expanding from the pole-piece makes it possible to characterize the behaviour of electromagnetic micro- and nano electromechanical systems (MEMS/NEMS) in which the deflection of the movable part is controlled by the electromagnetic force. What must be determined, however, is the magnetic field expanding from the e-beam column, which is a function of many factors, like working distance (WD), magnification and position of the device in relation to the e-beam column. There are only a few experimental methods for determination of the magnetic field in a scanning electron microscope. In this paper we present a method of the magnetic field determination under the scanning electron column by application of a silicon cantilever magnetometer. The micro-cantilever magnetometer is a silicon micro-fabricated MEMS electromagnetic device integrating a current loop of lithographically defined dimensions. Its stiffness can be calibrated with a precision of 5% by the method described by Majstrzyk et al. [4]. The deflection of the magnetometer cantilever is measured with a scanning electron microscope and thus, through knowing the bias current, it is possible to determine the magnetic field generated by the e-beam column in a defined position and at a defined magnification.

Evolution of many high technologies such as microelectronics, microsystem technology and nanotechnology involves design, application and testing of technical structures, whose size is being decreased continuously. Scanning probe microscopes (SPM) are therefore increasingly used as diagnostic and measurement instruments. Consequently the demand for standardized calibration routines for this kind of equipment rises. Up to now, there has been no in generally accepted guideline on how to perform SPM calibration procedure. In this article we discuss calibration scheme and focus on several critical aspects of SPM characterization e.g. the determination of the static and dynamic physical properties of the cantilever, the influence factors which need to be considered when plotting a scheme for the calibration of the force and displacement sensitivity.

This paper presents a suggested approach for forensic investigation of bridge decks in which Ground penetrating radar (GPR) consisting of two antennas is used to assess the current conditions. The methodology was tested on a bridge deck in central Sicily. The acquired data were analyzed for identifying the asphalt overlay thickness, concrete cover depth and deck thickness and location of the rebar reinforcement. In the proposed approach for assessing bridge deck conditions the GPR survey was complemented with (i) a site investigation on layer thicknesses for calibration/verification purposes of the GPR response and (ii) a Terrestrial Laser Scanning system (TLS) to verify the bridge design slab curvature. The study shows that this methodology has significant merits on accurately assessing such bridge deck components when bridge design records are non-existing, and by using non-invasive methods such as laser scanning and GPR. The great advantage provided by the TLS technique is the possibility to obtain a 3D output model of the scanned element with the accuracy of the best topographic instruments in order to complement GPR data surveys for bridge inspection.

The work presented here, concentrates on experimental surface roughness analysis in the milling of hardened steel using a monolithic torus mill. Machined surface roughness with respect to milling process dynamics has been investigated. The surface roughness model including cutter displacements has been developed. Cutting forces and cutter displacements (vibrations) were measured in order to estimate their quantitative influence on Ra and Rz parameters. The cutter displacements were measured online using a scanning 3D laser vibrometer. The influence of cutting speed vc on surface roughness parameters (Ra, Rz) was also studied. The research revealed that real surface roughness parameters are significantly higher than those calculated on the basis of a kinematic-geometric basic model, and their values are strongly dependent on dynamic cutter displacements.

A system for precise angular laser beam deflection by using a plane mirror is presented. The mirror was fixed to two supports attached to its edges. This article details the theoretical basis of how this deflector works. The spring deflection of a flat circular metal plate under a uniform axial buckling was used and the mechanical stress was generated by a piezoelectric layer. The characteristics of the deformation of the plate versus the voltage control of the piezoelectrics were examined and the value of the change resolution possible to obtain was estimated. An experimental system is presented and an experiment performed to examine this system. As a result, a resolution of displacement of 10-8 rad and a range of 10-5 rad were obtained.

Scanning probe microscopy (SPM) since its invention in the 80’s became very popular in examination of many different sample parameters, both in university and industry. This was the effect of bringing this technology closer to the operator. Although the ease of use opened a possibility for measurements without high labour requirement, a quantitative analysis is still a limitation in Scanning ProbeMicroscopes available on the market. Based on experience of Nano-metrology Group, SPM still can be considered as a tool for quantitative examination of thermal, electrical and mechanical surface parameters. In this work we present an ARMScope platform as a versatile SPM controller that is proved to be useful in a variety of applications: fromatomic-resolution STM (Scanning TunnellingMicroscopy) toMulti-resonance KPFM (Kelvin Probe force microscopy) to commercial SEMs (Scanning electron microscopes).

The techniques of photogrammetric reconstruction were compared to the laser scanning in the article. The different conditions and constraints were introduced for reconstructed images, e.g. different materials, lighting condition, camera resolution, number of images in the sequence or using a-pripori calibration. The authors compare the results of surface reconstruction using software tools avaliable for photogrammetric reconstruction. The analysis is preformed for the selected objects with regard to laserscanned models or mathematical models.