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Abstract

Evolution of many high technologies such as microelectronics, microsystem technology and nanotechnology involves design, application and testing of technical structures, whose size is being decreased continuously. Scanning probe microscopes (SPM) are therefore increasingly used as diagnostic and measurement instruments. Consequently the demand for standardized calibration routines for this kind of equipment rises. Up to now, there has been no in generally accepted guideline on how to perform SPM calibration procedure. In this article we discuss calibration scheme and focus on several critical aspects of SPM characterization e.g. the determination of the static and dynamic physical properties of the cantilever, the influence factors which need to be considered when plotting a scheme for the calibration of the force and displacement sensitivity.

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Authors and Affiliations

T. Gotszalk
A. Marendziak
K. Kolanek
R. Szeloch
P. Grabiec
M. Zaborowski
P. Janus
I.W. Rangelow
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Abstract

Scanning probe microscopy (SPM) since its invention in the 80’s became very popular in examination of many different sample parameters, both in university and industry. This was the effect of bringing this technology closer to the operator. Although the ease of use opened a possibility for measurements without high labour requirement, a quantitative analysis is still a limitation in Scanning ProbeMicroscopes available on the market. Based on experience of Nano-metrology Group, SPM still can be considered as a tool for quantitative examination of thermal, electrical and mechanical surface parameters. In this work we present an ARMScope platform as a versatile SPM controller that is proved to be useful in a variety of applications: fromatomic-resolution STM (Scanning TunnellingMicroscopy) toMulti-resonance KPFM (Kelvin Probe force microscopy) to commercial SEMs (Scanning electron microscopes).

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Authors and Affiliations

Bartosz Świadkowski
Tomasz Piasecki
Maciej Rudek
Michał Świątkowski
Krzysztof Gajewski
Wojciech Majstrzyk
Michał Babij
Andrzej Dzierka
Teodor Gotszalk

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