@misc{Knapkiewicz_P._Sealing_2016,
 author={Knapkiewicz, P. and Augustyniak, I.},
 volume={64},
 number={No 2},
 pages={283-286},
 howpublished={online},
 year={2016},
 title={Sealing of silicon-glass microcavities with polymer filling},
 doi={10.1515/bpasts-2016-0032},
}