TY - JOUR N2 - Quantum cascade laser is one of the most sophisticated semiconductor devices. Its technology requires extremely high precision and layers quality. Device performance is limited by thermal extraction form laser core. One of solutions is to apply highly resistivity epitaxial material acting as insulating layer on top of the QCL. Present work describes consequent steps of elaboration of MOVPE technology of Fe-compensated InP layers for further applications in quantum cascade lasers. L1 - http://journals.pan.pl/Content/115217/PDF/53_2020.pdf L2 - http://journals.pan.pl/Content/115217 PY - 2020 IS - No 2 EP - 394 DO - 10.24425/ijet.2020.131890 KW - MOVPE technology KW - optoelectronics KW - quantum cascade lasers KW - epitaxy A1 - Badura, MikoĊ‚aj PB - Polish Academy of Sciences Committee of Electronics and Telecommunications VL - vol. 66 DA - 2020.06.25 T1 - MOVPE Technology of Fe-Compensated In PLayers for the Quantum Cascade Laser Applications SP - 389 UR - http://journals.pan.pl/dlibra/publication/edition/115217 T2 - International Journal of Electronics and Telecommunications ER -