TY - JOUR N2 - Numerous technological applications use MEMS capacitive sensing technique as a major component, because of their ease of fabrication process, inexpensive and high sensitivity. The paper aims at modeling interdigitated capacitive (IDC) sensing. Virtually observe the contribution of variations in geometrical parameters to sensor efficiency and optimization factor. The sensor design is verified through ANSYS simulations. Results indicate “an efficient but poorly optimized sensor is better than a well-optimized sensor”. It is difficult to detect capacitance in the range of few pF generated using capacitive sensing. How it can be maximized with dimension optimization is focused in this paper. L1 - http://journals.pan.pl/Content/123379/PDF-MASTER/40-3396-Kulkarni-sk-b_new.pdf L2 - http://journals.pan.pl/Content/123379 PY - 2022 IS - No 2 EP - 291 DO - 10.24425/ijet.2022.139880 KW - virtual IDE modelling KW - MEMS KW - sensor optimization KW - ANSYS modeling and applications A1 - Kulkarni, Vaishali Sanjay A1 - Chorage, Suvarna Sandip PB - Polish Academy of Sciences Committee of Electronics and Telecommunications VL - vol. 68 DA - 2022.06.12 T1 - An Efficient MEMS Sensor Modelling by Geometrical Parameter Optimization SP - 287 UR - http://journals.pan.pl/dlibra/publication/edition/123379 T2 - International Journal of Electronics and Telecommunications ER -