Title

Internal Friction and Young's Modulus Measurements on SiO2 and Ta2O5 Films Done with an Ultra-High Q Silicon-Wafer Suspension

Journal title

Archives of Metallurgy and Materials

Yearbook

2015

Issue

No 1 March

Authors

Granata, M. ; Balzarini, L. ; Degallaix, J. ; Dolique, V. ; Flaminio, R. ; Forest, D. ; Hofman, D. ; Michel, C. ; Pedurand, R. ; Pinard, L. ; Sassolas, B. ; Straniero, N. ; Teillon, J. ; Cagnoli, G.

Divisions of PAS

Nauki Techniczne

Publisher

Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences

Date

2015[2015.01.01 AD - 2015.12.31 AD]

Identifier

DOI: 10.1515/amm-2015-0060 ; e-ISSN 2300-1909

Source

Archives of Metallurgy and Materials; 2015; No 1 March

References

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