Details Details PDF BIBTEX RIS Title Measurement, Modeling and Evaluation of Surface Parameter Using Capacitive-Sensor-Based Measurement System Journal title Metrology and Measurement Systems Yearbook 2011 Numer No 3 Authors Murugarajan, A. ; Samuel, G. Keywords capacitive sensor ; surface roughness ; machined surfaces Divisions of PAS Nauki Techniczne Coverage 403-418 Publisher Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation Date 2011 Type Artykuły / Articles Identifier DOI: 10.2478/v10178-011-0007-9 References Jiang X. (2007), Paradigm shifts in surface metrology. Part I. Historical Philosophy, Proceedings of Royal Society A, 463, 2049, doi.org/10.1098/rspa.2007.1874 ; Goh K. (1986), The applicability of a laser triangulation probe to non-contacting inspection, International Journal of Production Research, 24, 6, 1331, doi.org/10.1080/00207548608919807 ; Uchida S. 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