Details Details PDF BIBTEX RIS Title Measurement, Modeling and Evaluation of Surface Parameter Using Capacitive-Sensor-Based Measurement System Journal title Metrology and Measurement Systems Yearbook 2011 Issue No 3 Authors Murugarajan, A. ; Samuel, G. Keywords capacitive sensor ; surface roughness ; machined surfaces Divisions of PAS Nauki Techniczne Coverage 403-418 Publisher Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation Date 2011 Type Artykuły / Articles Identifier DOI: 10.2478/v10178-011-0007-9 ; ISSN 2080-9050, e-ISSN 2300-1941 Source Metrology and Measurement Systems; 2011; No 3; 403-418 References Jiang X. (2007), Paradigm shifts in surface metrology. Part I. Historical Philosophy, Proceedings of Royal Society A, 463, 2049, doi.org/10.1098/rspa.2007.1874 ; Goh K. 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