Title

Numerical Analysis of Sensitivity of SAW Structure to the Effect of Toxic Gases

Journal title

Archives of Acoustics

Yearbook

2016

Volume

vol. 41

Issue

No 4

Authors

Hejczyk, Tomasz ; Pustelny, Tadeusz ; Wszołek, Bartłomiej ; Jakubik, Wiesław ; Maciak, Erwin

Keywords

surface acoustics wave SAW ; Ingebrigtsen’s formula ; gas diffusion equations ; gaseous acoustic sensors ; numerical analyses of SAW structures

Divisions of PAS

Nauki Techniczne

Coverage

747-755

Publisher

Polish Academy of Sciences, Institute of Fundamental Technological Research, Committee on Acoustics

Date

2016

Type

Artykuły / Articles

Identifier

DOI: 10.1515/aoa-2016-0072

Source

Archives of Acoustics; 2016; vol. 41; No 4; 747-755

References

HejczykT (2015), Numerical and Experimental Analysis of the Response of a SAW Structure with WO layers an Action of Carbon Monoxide, Archives of Acoustics, 40, 1. ; HejczykT (2012), SAW sensors for detection of hydrocarbons Numerical analysis and experimental results the :, Bulletin of Polish Academy of Sciences Technical Sciences, 589. ; HejczykT (2010), Analytical Model of Semiconductor Sensor Layers in SAW Gas Sensors, Acta Physica Polonica A, 1148, doi.org/10.12693/APhysPolA.118.1148 ; JasekK (2011), New approach to saw gas sensors array response measurement, Acta Physica Polonica A, 639, doi.org/10.12693/APhysPolA.120.639 ; JasekK (2012), SAW sensor for mercury vapour detection, Acta Physica Polonica A, 825, doi.org/10.12693/APhysPolA.122.825 ; MatsumagaN (2003), Formulation of gas diffusion dynamics for thin film semiconductor gas sensor based on simple reaction - diffusion equation, Sensors and Actuators, 226, doi.org/10.1016/S0925-4005(03)00529-X ; KawalecA (2008), Measurements results of SAW humidity sensor with nafion layer :, European Physical Journal Special Topics, 154. ; PustelnyB (2009), Transverse acoustoelectric effect applying in surface study of GaP, Acta Physica Polonica A, 111. ; HejczykT (2011), WO - Pd Structure in SAW Sensor Hydrogen Detection, Acta Physica Polonica A, 616, doi.org/10.12693/APhysPolA.120.616 ; MatsumagaN (2001), Diffusion equation - based study of thin film semiconductor gas sensor - response transient, Sensors and Actuators, 216. ; KawalecA (2008), Microwave humidity sensor based on surface acoustic wave resonator with nafion layer on Instrumentation and Measurement, IEEE Transactions, 9, 2019. ; UrbanczykM (2011), Analysis of non - steady state in SAW gas sensors with semiconducting sensor layers, Acta Phys Polonica, 789, doi.org/10.12693/APhysPolA.120.789 ; PorterJ (2004), Thermodynamic correlations and band gap calculations in metal oxides Elsevier in Solid, Progress State Chemistry, 207, doi.org/10.1016/j.progsolidstchem.2005.05.001