Title

New type of Piezoresistive Pressure Sensors for Environments with Rapidly Changing Temperature

Journal title

Metrology and Measurement Systems

Yearbook

2017

Volume

vol. 24

Issue

No 1

Authors

Tykhan, Myroslav ; Ivakhiv, Orest ; Teslyuk, Vasyl

Keywords

pressure ; sensor ; non-stationary ; temperature

Divisions of PAS

Nauki Techniczne

Publisher

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Date

2017.03.30

Type

Artykuły / Articles

Identifier

DOI: 10.1515/mms-2017-0010 ; ISSN 2080-9050, e-ISSN 2300-1941

Source

Metrology and Measurement Systems; 2017; vol. 24; No 1

Pages

185-192

References

Ko (2007), Novel fabrication of a pressure sensor with polymer material and evaluation of its performance Journal of Micromechanics and, Microengineering, 17, 1640, doi.org/10.1088/0960-1317/17/8/030 ; Lai (2005), A Piezoresistive Micro Pressure Sensor Fabricated by Commercial DPDM CMOS Process Tamkang Journal of Science and, Engineering, 8, 67.