Title

Analysis of the Surface Microtexture of Sputtered Indium Tin Oxide Thin Films

Journal title

Archives of Metallurgy and Materials

Yearbook

2021

Volume

vol. 66

Issue

No 2

Authors

Ţălu, Ş. ; Kulesza, S. ; Bramowicz, M. ; Stępień, K. ; Dastan, D.

Affiliation

Ţălu, Ş. : Technical University of Cluj-Napoca, The Directorate of Research, Development and Innovation Management (DMCDI), Cluj-Napoca, 400020, Romania ; Kulesza, S. : University of Warmia and Mazury in Olsztyn, Faculty of Technical Sciences, 11 Oczapowskiego Str., 10-719 Olsztyn, Poland ; Bramowicz, M. : University of Warmia and Mazury in Olsztyn, Faculty of Technical Sciences, 11 Oczapowskiego Str., 10-719 Olsztyn, Poland ; Stępień, K. : Kielce University of Technology, Faculty of Mechatronics and Mechanical Engineering, Aleja 1000-lecia Państwa Polskiego 7, 25-314 Kielce, Poland ; Dastan, D. : Georgia Institute of Technology, School of Materials Science and Engineering, Atlanta, Georgia 30332, USA

Keywords

AFM ; DC magnetron sputtering ; ITO thin films ; stereometric analysis ; 3-D surface microtexture

Divisions of PAS

Nauki Techniczne

Coverage

443-450

Publisher

Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences

Date

2021.05.13

Type

Article

Identifier

DOI: 10.24425/amm.2021.135877

Source

Archives of Metallurgy and Materials; 2021; vol. 66; No 2; 443-450