Details
Title
Investigation of noise in surface topography measurement using structured illumination microscopyJournal title
Metrology and Measurement SystemsYearbook
2021Volume
vol. 28Issue
No 4Authors
Affiliation
Li, Zhen : Chemnitz University of Technology, Department of Production Measuring Technology, Reichenhainer Straße 70, 09126 Chemnitz, Germany ; Gröger, Sophie : Chemnitz University of Technology, Department of Production Measuring Technology, Reichenhainer Straße 70, 09126 Chemnitz, GermanyKeywords
surface topography measurement ; measurement noise ; uncertainty ; structured illumination microscopyDivisions of PAS
Nauki TechniczneCoverage
767-779Publisher
Polish Academy of Sciences Committee on Metrology and Scientific InstrumentationBibliography
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