Details
Title
Investigation of noise in surface topography measurement using structured illumination microscopyJournal title
Metrology and Measurement SystemsYearbook
2021Volume
vol. 28Issue
No 4Affiliation
Li, Zhen : Chemnitz University of Technology, Department of Production Measuring Technology, Reichenhainer Straße 70, 09126 Chemnitz, Germany ; Gröger, Sophie : Chemnitz University of Technology, Department of Production Measuring Technology, Reichenhainer Straße 70, 09126 Chemnitz, GermanyAuthors
Keywords
surface topography measurement ; measurement noise ; uncertainty ; structured illumination microscopyDivisions of PAS
Nauki TechniczneCoverage
767-779Publisher
Polish Academy of Sciences Committee on Metrology and Scientific InstrumentationBibliography
[1] International Organization for Standardization. (2019). Geometrical product specifications (GPS) – Surface texture: Areal – Part 600: Metrological characteristics for areal topography measuring methods (ISO 25178-600:2019). https://www.iso.org/standard/67651.html[2] de Groot, P., & DiSciacca, J. (2020). Definition and evaluation of topography measurement noise in optical instruments. Optical Engineering, 59(6), 064110. https://doi.org/10.1117/1.OE.59.6.064110
[3] Eifler, M., Hering, J., Seewig, J., Leach, R. K., von Freymann, G., Hu, X., & Dai, G. (2020). Comparison of material measures for areal surface topography measuring instrument calibration. Surface Topography: Metrology and Properties, 8(2), 025019. https://doi.org/10.1088/2051-672X/ab92ae
[4] Vanrusselt, M., Haitjema, H., Leach, R., & de Groot, P. (2021). International comparison of noise in areal surface topography measurements. Surface Topography: Metrology and Properties, 9(2), 025015. https://doi.org/10.1088/2051-672X/abfa29
[5] Giusca, C. L., Leach, R. K., Helary, F., Gutauskas, T., & Nimishakavi, L. (2012). Calibration of the scales of areal surface topography-measuring instruments: Part 1. Measurement noise and residual flatness. Measurement Science and Technology, 23(3), 035008. https://doi.org/10.1088/0957-0233/23/3/035008
[6] Grochalski, K., Wieczorowski, M., Pawlus, P., & H’Roura, J. (2020). Thermal sources of errors in surface texture imaging. Materials, 13(10), 2337. https://doi.org/10.3390/ma13102337
[7] Fu, S., Cheng, F., Tjahjowidodo, T., Zhou, Y., & Butler, D. (2018). A non-contact measuring system for in-situ surface characterization based on laser confocal microscopy. Sensors, 18(8), 2657. https://doi.org/10.3390/s18082657
[8] Barker, A., Syam, W. P., & Leach, R. K. (2016, October). Measurement noise of a coherence scanning interferometer in an industrial environment. Proceedings of the Thirty-First Annual Meeting of the American Society for Precision Engineering (vol. 65, pp. 594–599). http://eprints.nottingham.ac.uk/id/eprint/38454
[9] Gomez, C., Su, R., De Groot, P., & Leach, R. (2020). Noise reduction in coherence scanning interferometry for surface topography measurement. Nanomanufacturing and Metrology, 3, 68–76. https://doi.org/10.1007/s41871-020-00057-4
[10] Leach, R. (Ed.). (2011). Optical Measurement of Surface Topography (Vol. 8). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-12012-1
[11] Maculotti, G., Feng, X., Galetto, M., & Leach, R. (2018). Noise evaluation of a point autofocus surface topography measuring instrument. Measurement Science and Technology, 29(6), 065008. https://doi.org/10.1088/1361-6501/aab528
[12] De Groot, P. J. (2017). The meaning and measure of vertical resolution in optical surface topography measurement. Applied Sciences, 7(1), 54. https://doi.org/10.3390/app7010054
[13] Haitjema, H., & Morel, M. A. A. (2005). Noise bias removal in profile measurements. Measurement, 38(1), 21–29. https://doi.org/10.1016/j.measurement.2005.02.002
[14] Leach, R., Haitjema, H., Su, R.,&Thompson, A. (2020). Metrological characteristics for the calibration of surface topography measuring instruments: a review. Measurement Science and Technology, 32(3), 032001. https://doi.org/10.1088/1361-6501/abb54f
[15] DIN. (2008). Optical measurement and microtopographies – Calibration of interference microscopes and depth measurement standards for roughness measurement (VDI/VDE 2655 Blatt 1.1).
[16] DIN. (2010). Optical measurement of microtopography – Calibration of confocal microscopes and depth setting standards for roughness measurement (VDI/VDE 2655 Blatt 1.2).
[17] de Groot, P., & DiSciacca, J. (2018, August). Surface-height measurement noise in interference microscopy. Interferometry XIX (Vol. 10749, p. 107490Q). International Society for Optics and Photonics. https://doi.org/10.1117/12.2323900
[18] Pawlus, P., Reizer, R., & Wieczorowski, M. (2017). Problem of non-measured points in surface texture measurements. Metrology and Measurement Systems, 24(3), 525–536. https://doi.org/10.1515/mms-2017-0046
[19] International Organization for Standardization. (2012). Geometrical product specifications (GPS) – Surface texture: Areal – Part 3: Specification operators (ISO 25178-3:2012).
[20] Blateyron, F. (2014, May). Good practices for the use of areal filters. Proc. 3rd Seminar on Surface Metrology of the Americas.
[21] Podulka, P. (2020). Proposal of frequency-based decomposition approach for minimization of errors in surface texture parameter calculation. Surface and Interface Analysis, 52(12), 882–889. https://doi.org/10.1002/sia.6840
[22] He, B., Zheng, H., Ding, S.,Yang, R.,& Shi, Z. (2021).Areviewof digital filtering in surface roughness evaluation. Metrology and Measurement Systems, 28(2). https://doi.org/10.24425/mms.2021.136606
[23] Podulka, P. (2020). Comparisons of envelope morphological filtering methods and various regular algorithms for surface texture analysis. Metrology and Measurement Systems, 27(2), 243–263. https://doi.org/10.24425/mms.2020.132772
[24] Podulka, P. (2021). Reduction of Influence of the High-Frequency Noise on the Results of Surface Topography Measurements. Materials, 14(2), 333. https://doi.org/10.3390/ma14020333
[25] Todhunter, L., Leach, R., & Blateyron, F. (2020). Mathematical approach to the validation of surface texture filtration software. Surface Topography: Metrology and Properties, 8(4), 045017. https://doi.org/10.1088/2051-672X/abc0fb
[26] Vanrusselt, M., & Haitjema, H. (2020). Reduction of noise bias in 2.5 D surface measurements. In Proceedings of Euspen’s 20th International Conference & Exhbition, 277–281. European Society for Precision Engineering; Nothampton.
[27] Gomez, C., Su, R., Lawes, S., & Leach, R. (2019). Comparison of two noise reduction methods in coherence scanning interferometry for surface measurement. The 14th International Symposium on Measurement Technology and Intelligent Instruments.
[28] Sánchez, Á. R., Thompson, A., Körner, L., Brierley, N., & Leach, R. (2020). Review of the influence of noise in X-ray computed tomography measurement uncertainty. Precision Engineering, 66, 382–391. https://doi.org/10.1016/j.precisioneng.2020.08.004
[29] confovis GmbH. Structured Illumination Microscopy. https://www.confovis.com/en/optical-measurement
[30] International Organization for Standardization. (2012). Geometrical product specifications (GPS) – Surface texture: Areal – Part 2: Terms, definitions and surface texture parameters (ISO 25178-2:2012).
[31] International Organization for Standardization. (2020). Geometrical product specifications (GPS) – Surface texture: Areal – Part 700: Calibration, adjustment and verification of areal topography measuring instruments (ISO/DIS 25178-700:2020).
[32] Leach, R., Haitjema, H., & Giusca, C. (2019). A metrological characteristics approach to uncertainty in surface metrology. Optical Inspection of Microsystems, 73–91. CRC Press.
[33] Haitjema, H. (2015). Uncertainty in measurement of surface topography. Surface Topography: Metrology and Properties, 3(3), 035004. https://doi.org/10.1088/2051-672X/3/3/035004
[34] Yang, Z., Kessel, A., & Häusler, G. (2015). Better 3D Inspection with Structured Illumination: Signal Formation and Precision. Applied Optics, 54(22), 6652–6660. https://doi.org/10.1364/AO.54.006652
[35] Gomez, C., Su, R., Thompson, A., DiSciacca, J., Lawes, S., & Leach, R. K. (2017). Optimization of surface measurement for metal additive manufacturing using coherence scanning interferometry. Optical Engineering, 56(11), 111714. https://doi.org/10.1117/1.OE.56.11.111714
[36] Zhou, Y., Troutman, J., Evans, C., & Davies, A. (2014, June). Using the random ball test to calibrate slope dependent errors in optical profilometry. Optical Fabrication and Testing, OW4B-2. Optical Society of America. https://doi.org/10.1364/OFT.2014.OW4B.2