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Title

Optimised magnetron sputtering method for the deposition of indium tin oxide layers

Journal title

Bulletin of the Polish Academy of Sciences Technical Sciences

Yearbook

2021

Volume

69

Issue

6

Authors

Musztyfaga-Staszuk, Małgorzata ; Pudiš, Dušan ; Socha, Robert ; Gawlińska-Nęcek, Katarzyna ; Panek, Piotr

Affiliation

Musztyfaga-Staszuk, Małgorzata : Silesian University of Technology, Welding Department, ul. Konarskiego 18A, 44-100 Gliwice, Poland ; Pudiš, Dušan : Faculty of Faculty of Electrical Engineering and Information Technology, Department of Physics, Zilina, Slovakia ; Socha, Robert : Institute of Catalysis and Surface Chemistry, Polish Academy of Sciences, ul. Niezapominajek 8, 30-239 Krakow, Poland ; Gawlińska-Nęcek, Katarzyna : Institute of Metallurgy and Materials Science PAS, ul. Reymonta 25, 30-059 Krakow, Poland ; Panek, Piotr : Institute of Metallurgy and Materials Science PAS, ul. Reymonta 25, 30-059 Krakow, Poland

Keywords

In₂O₃ ; Sn₂O ; ITO ; magnetron sputtering method

Divisions of PAS

Nauki Techniczne

Coverage

e139005

Bibliography

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Date

04.11.2021

Type

Article

Identifier

DOI: 10.24425/bpasts.2021.139005
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