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Title

Effect of heat treatment on the surface morphology and optical properties of the Al2O3 thin film for use in solar cells

Journal title

Opto-Electronics Review

Yearbook

2021

Volume

29

Issue

4

Affiliation

Szindler, Marek : Scientific and Didactic Laboratory of Nanotechnology and Material Technologies, Faculty of Mechanical Engineering, Silesian University of Technology, 7 Towarowa St., 44-100 Gliwice, Poland ; Szindler, Magdalena M. : Department of Engineering Materials and Biomaterials, Faculty of Mechanical Engineering, Silesian University of Technology, 18a Konarskiego St., 44-100 Gliwice, Poland

Authors

Szindler, Marek ; Szindler, Magdalena M.

Keywords

antireflection coating ; atomic layer deposition method ; solar cells

Divisions of PAS

Nauki Techniczne

Coverage

181-186

Publisher

Polish Academy of Sciences (under the auspices of the Committee on Electronics and Telecommunication) and Association of Polish Electrical Engineers in cooperation with Military University of Technology

Bibliography

  1. Marks-Bielska, R. et al. The importance of renewable energy sources in Poland’s energy Energies 13, 1–23 (2020). https://doi.org/10.3390/en13184624
  2. Asfar, Y. et al. Evaluating Photovoltaic Performance Indoors. in 2012 38th IEEE Photovoltaic Specialists Conference (PVSC). 1948–1951 (IEEE, Austin, USA 2012).
  3. Ranjan, S. et al. Silicon solar cell production. Comput. Chem. Eng. 35, 1439–1453 (2011). https://doi.org/10.1016/j.compchemeng.2011.04.017
  4. Drygala, A. et al. Influence of laser texturization surface and atomic layer deposition on optical properties of polycrystalline silicon. Int. J. Hydrog. Energy 41, 7563–7567 (2016). https://doi.org/10.1016/j.ijhydene.2015.12.180
  5. Hou, G., Garcia, I. & Rey-Stolle, I. High-low refractive index stacks for broadband antireflection coatings for multijunction solar cells. Sol. Energy 217, 29–39 (2021). https://doi.org/10.1016/j.solener.2021.01.060
  6. Dobrzański, L. A., Szindler, M., Drygała, A. & Szindler, M.M., Silicon solar cells with Al2O3 antireflection coating. Cen. Eur. J. Phys. 12, 666–670 (2014). https://doi.org/10.2478/s11534-014-0500-9
  7. Sarkar, S. & Pradhan, S. K. Silica-based antireflection coating by glancing angle deposition. Surf. Eng. 35, 982–985. (2019). https://doi.org/10.1080/02670844.2019.1596578
  8. Szindler, M. Szindler, M. M., Boryło, P. & Jung, T. Structure and optical properties of TiO2 thin films deposited by ALD Open Phys. 15, 1067–1071 (2017). https://doi.org/10.1515/phys-2017-0137
  9. Król, K. et al. Influence of atomic layer deposition temperature on the electrical properties of Al/ZrO2/SiO2/4H-SiC metal-oxide semiconductor structures. Phys. Status Solidi (A) 215, 1–7 (2018). https://doi.org/10.1002/pssa.201700882
  10. Boryło, P. et al. Structure and properties of Al2O3 thin films deposited by ALD proces. Vacuum 131, 319–326 (2016). https://doi.org/10.1016/j.vacuum.2016.07.013
  11. Drabczyk, K. et al. Comparison of diffused layer prepared using liquid dopant solutions and pastes for solar cell with screen printed electrodes. Microelectron. Int. 33, 167–171 (2016). https://doi.org/10.1108/MI-03-2016-0031
  12. Öğütman, K. et al. Spatial atomic layer deposition of aluminum oxide as a passivating hole contact for silicon solar Phys. Status Solidi (A) 217, 1–6 (2020). https://doi.org/10.1002/pssa.202000348
  13. Drabczyk, K. et al. Electroluminescence imaging for determining the influence of metallization parameters for solar cell metal contacts. Sol. Energy 126, 14–21 (2016). https://doi.org/10.1016/j.solener.2015.12.029
  14. Park, H. H. Inorganic materials by atomic layer deposition for perovskite solar cells. Nanomaterials 11, 1–22 (2021). https://doi.org/10.3390/nano11010088
  15. Hossain, A. et al. Atomic layer deposition enabling higher efficiency solar cells: A review. Nano Materials 2, 204–226 (2020). https://doi.org/10.1016/j.nanoms.2019.10.001
  16. Werner, F. et al. High-rate atomic layer deposition of Al2O3 for the surface passivation of Si solar cells. Energy Procedia 8, 301–306 (2011). https://doi.org/10.1016/j.egypro.2011.06.140
  17. Werner, F., Cosceev, A. & Schmidt, J. Silicon surface passivation by Al2O3: Recombination parameters and inversion layer solar cells. Energy Procedia 27, 319–324 (2012). https://doi.org/10.1016/j.egypro.2012.07.070
  18. Swatowska, B. Antireflective and passivation properties of the photovoltaic structure with Al2O3 layer of different thickness. Microelectron. Int. 35, 177–180 (2018). https://doi.org/10.1108/MI-04-2018-0020

Date

29.03.2022

Type

Article

Identifier

DOI: 10.24425/opelre.2021.139602
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