Title

The Effect of Titanium Nitride Thickness as a Support Layer for Carbon Nanotubes Growth

Journal title

Archives of Metallurgy and Materials

Yearbook

2022

Volume

vol. 67

Issue

No 3

Authors

Ramli, Muhammad M. ; Osman, N.H. ; Darminto, D. ; Abdullah, M.M.A.B.

Affiliation

Ramli, Muhammad M. : Universiti Malaysia Perlis (UniMAP), Geopolymer & Green Technology, Centre of Excellence (CEGeoGTech), Perlis, Malaysia ; Ramli, Muhammad M. : Universiti Malaysia Perlis (UniMAP), Faculty of Electronic Engineering Technology, Perlis, Malaysia ; Osman, N.H. : Universiti Malaysia Perlis (UniMAP), Faculty of Electronic Engineering Technology, Perlis, Malaysia ; Osman, N.H. : Universiti Putra Malaysia, Faculty of Science, Department of Physic, Applied Electromagnetic Laboratory, 43400 Serdang, Selangor, Malaysia ; Darminto, D. : Institut Teknologi Sepuluh Nopember, Faculty of Science and Analytical Data, Department of Physic, Campus ITS Sukolilo-Surabaya 60111, Indonesia ; Abdullah, M.M.A.B. : Universiti Malaysia Perlis (UniMAP), Geopolymer & Green Technology, Centre of Excellence (CEGeoGTech), Perlis, Malaysia

Keywords

Titanium Nitride ; Support Layer ; carbon nanotubes ; Interconnection

Divisions of PAS

Nauki Techniczne

Coverage

963-966

Publisher

Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences

Date

2022.08.26

Type

Article

Identifier

DOI: 10.24425/amm.2022.139689