Title

Structural, Electrical, and Optical Properties of ZnO Films Grown by Atomic Layer Deposition at Low Temperature

Journal title

Archives of Metallurgy and Materials

Yearbook

2022

Volume

vol. 67

Issue

No 4

Authors

Park, Ji Young ; Weon, Ye Bin ; Jung, Myeong Jun ; Choi, Byung Joon

Affiliation

Park, Ji Young : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea ; Weon, Ye Bin : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea ; Jung, Myeong Jun : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea ; Choi, Byung Joon : Seoul National University of Science and Technology, Department of Material Science and Engineering, Seoul, Korea

Keywords

Zinc Oxide (ZnO) ; Atomic layer deposition ; Low temperature growth ; Optoelectronic properties

Divisions of PAS

Nauki Techniczne

Coverage

1503-1506

Publisher

Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Committee of Materials Engineering and Metallurgy of Polish Academy of Sciences

Date

2022.11.23

Type

Article

Identifier

DOI: 10.24425/amm.2022.141082