Tytuł artykułu

Dynamic tilt testing of MEMS inclinometers based on conical motions

Tytuł czasopisma

Metrology and Measurement Systems

Rocznik

2023

Wolumin

vol. 30

Numer

No 1

Afiliacje

Yang, Qihang : College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China ; Cai, Chenguang : National Institute of Metrology of China, Beijing 100013, China ; Yang, Ming : College of Electrical Engineering, Guizhou University, Guiyang 550025, China ; Kong, Ming : College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China ; Liu, Zhihua : National Institute of Metrology of China, Beijing 100013, China ; Liang, Feng : Shenyang Aircraft Corporation, Shenyang 110031, China

Autorzy

Yang, Qihang ; Cai, Chenguang ; Yang, Ming ; Kong, Ming ; Liu, Zhihua ; Liang, Feng

Słowa kluczowe

MEMS inclinometer ; sensitivity ; dynamic testing ; conical motion ; angle drift

Wydział PAN

Nauki Techniczne

Zakres

31-47

Wydawca

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Data

2023.05.29

Typ

Article

Identyfikator

DOI: 10.24425/mms.2023.144398 ; eISSN 2300-1941