Title

Quantification of microstructural homogeneity in indium arsenide epilayers by X-ray diffraction

Journal title

Metrology and Measurement Systems

Yearbook

2024

Volume

vol. 31

Issue

No 2

Authors

Odrzywolski, Sebastian ; Kojdecki, Marek Andrzej ; Złotnik, Sebastian ; Kubiszyn, Łukasz ; Wróbel, Jarosław

Affiliation

Odrzywolski, Sebastian : Institute of Applied Physics, Military University of Technology, 2 Kaliskiego Street, 00-908 Warsaw, Poland ; Kojdecki, Marek Andrzej : Institute of Mathematics and Cryptology, Military University of Technology, 2 Kaliskiego Street, 00-908 Warsaw, Poland ; Złotnik, Sebastian : Institute of Applied Physics, Military University of Technology, 2 Kaliskiego Street, 00-908 Warsaw, Poland ; Kubiszyn, Łukasz : VIGO Photonics S.A., 129/133 Poznanska St., 05-850 Ozarów Mazowiecki, Poland ; Wróbel, Jarosław : Institute of Applied Physics, Military University of Technology, 2 Kaliskiego Street, 00-908 Warsaw, Poland

Keywords

X-ray diffraction ; crystalline structure ; crystalline microstructure ; epitaxy ; indium arsenide ; crystallite size ; first-order strain ; second-order strain

Divisions of PAS

Nauki Techniczne

Coverage

231-257

Publisher

Polish Academy of Sciences Committee on Metrology and Scientific Instrumentation

Date

19.08.2024

Type

Article

Identifier

DOI: 10.24425/mms.2024.149700