Title

Metalorganic vapour phase epitaxy of GaN-based structures grown on etched and non-etched Si(115) substrates for piezoelectric component separated devices

Journal title

Bulletin of the Polish Academy of Sciences Technical Sciences

Yearbook

2025

Volume

73

Issue

5

Authors

Wosko, Mateusz ; Paszkiewicz, Bartłomiej ; Paszkiewicz, Bogdan ; Ilgiewicz, Grzegorz ; Sankowska, Iwona ; Paszkiewicz, Regina

Affiliation

Wosko, Mateusz : Faculty of Electronics, Photonics and Microsystems, Wroclaw University of Science and Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland ; Paszkiewicz, Bartłomiej : Faculty of Electronics, Photonics and Microsystems, Wroclaw University of Science and Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland ; Paszkiewicz, Bogdan : Faculty of Electronics, Photonics and Microsystems, Wroclaw University of Science and Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland ; Ilgiewicz, Grzegorz : Faculty of Electronics, Photonics and Microsystems, Wroclaw University of Science and Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland ; Sankowska, Iwona : Łukasiewicz – Institute of Microelectronics and Photonics, al. Lotników 32/46, 02-668 Warsaw, Poland ; Paszkiewicz, Regina : Faculty of Electronics, Photonics and Microsystems, Wroclaw University of Science and Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland

Keywords

metalorganic vapor phase epitaxy ; semi-polar GaN ; patterned Si substrates

Divisions of PAS

Nauki Techniczne

Coverage

e154728

Date

02.06.2025

Type

Article

Identifier

DOI: 10.24425/bpasts.2025.154728