Mechanisms for self-assembling topography formation in low-temperature vacuum deposition of inorganic coatings on polymer surfaces

Journal title

Bulletin of the Polish Academy of Sciences Technical Sciences






No 2


Divisions of PAS

Nauki Techniczne






DOI: 10.2478/v10175-010-0026-2 ; ISSN 2300-1917


Bulletin of the Polish Academy of Sciences: Technical Sciences; 2010; 58; No 2; 281-294


Rother B. (1992), Plasmabeschichtungsverfahren und Hartstoffschichten. ; Metev S. (1998), Laser-assisted Microtechnology. ; Akhsakhalyan A. (1982), Processes occurring in an erosion plasma during laser vacuum deposition of films - 1. Properties of a laser erosion plasma in the inertial-expansion stage, Soviet Physics. Technical Physics, 27, 969. ; J. M. Lackner, "Industrially-scaled hybrid pulsed laser deposition at room temperature", <i>Habilitation Thesis</i>, Polish Academy of Sciences - Institute of Metallurgy and Materials Science, Cracow, 2005. ; Thornton J. (1974), Influence of apparatus geometry and deposition conditions of the structure and topography of thick sputtered coatings, J. Vacuum Science and Technology, 11, 666. ; Messier R. (1984), Revised structure zone model for thin film physical structure, J. Vacuum Science and Technology, A 2, 500. ; Hanley L. (2002), The growth and modification of materials via ion-surface processing, Surface Science, 500, 500. ; Ziegler J. (1985), The Stopping and Range of Ions in Solids. ; Jacobs D. (1995), The role of internal energy and approach geometry in molecule/surface reactive scattering, J. Physics: Condensed Matter, 7, 1023. ; Seshan K. (2002), Handbook of Thin Film Deposition - Processes and Technologies. ; Smith D. (1995), Thin Film Deposition: Principles and Practice. ; Movchan B. (1969), Structure and properties of thick vacuum-condensates of nickel, titanium, tungsten, aluminum oxide, and zirconium dioxide, Physics of Metals and Metallography, 28, 83. ; Thornton J. (1977), High rate thick film growth, Annual Review of Materials Science, 7, 239. ; Ohring M. (2002), Materials Science of Thin Films: Deposition and Structure. ; J. M. Lackner, "Innovative coating by pulsed laser deposition", <i>PhD Thesis</i>, University of Leoben, Leoben, 2003. ; M. Kahn, <i>PhD thesis</i>, Montanuniversität Leoben, Leoben, 2010, to be published. ; Sächtling H. (1992), Kunststoff-Handbuch. ; <i>TrueGage</i>, TrueMap v4.0, 2009. ; <i>Nanotec</i>, WSxM v3.0, 2009. ; Nečas D. (2009), AFM and SPM software, Version 2.17. ; Teichert J. (2002), Self-organization of nanostructure in semiconductor heteroepitaxy, Physics Report, 365, 335. ; Sinha S. (1988), X ray and neutron scattering from rough surfaces, Phys. Rev, B 38, 4, 2297. ; Teichert Ch. (2002), Nanometer scale of characterization of polymer films by atomic-force microscopy, Macromolecular Symposia, 181, 457. ; Jehn H. (1987), Hartstoffschichten zur Verschleißminderung. ; Ensinger W. (1997), Low energy ion assist during deposition - an effective tool for controlling thin film microstructure, Nuclear Instruments and Methods in Physics Research, B 127/128, 796. ; Lackner J. (2006), Film growth phenomena in high-energetic room temperature pulsed laser deposition on polymer surfaces, Surface and Coatings Technology, 201, 4037. ; Müller K. (1988), Summary abstract: molecular dynamics studies of thin-film deposition, J. Vacuum Science and Technology, A6, 1690. ; Durand H. (1998), Relation of initial thin film formation to defects induced by low energy ions, Thin Solid Films, 336, 42. ; Major R. (2006), Elastic TiN coating deposited on polyurethane by pulsed laser, Surface and Coatings Technology, 200, 6340. ; Rickerby D. (1989), X-ray diffraction studies of physically vapour-deposited coatings, Surface and Coatings Technology, 37, 111. ; Rickerby D. (1987), The interrelationship between internal stress, processing parameters and microstructure of physically vapour deposited and thermally sprayed coatings, Thin Solid Films, 154, 125. ; Lackner J. (2004), Structural, mechanical and tribological investigations of pulsed laser deposited titanium nitride coatings, Thin Solid Films, 453-454, 195. ; Lackner J. (2004), New trends in coating: Room temperature deposition of titanium-based films, Materials Engineering, 140, 611. ; Gong X.-Y. (1998), On the measurement of strain in coatings formed on a wrinkled elastic substrate, Oxidation Metals, 50, 355. ; Kinbara A. (1981), Mechanical properties of and cracks and wrinkles in vacuum-deposited MgF2, carbon and baron coatings, Thin Solid Films, 84, 205. ; Matuda N. (1981), Internal stress, young's modulus and adhesion energy of carbon films on glass substrates, Thin Solid Films, 81, 301. ; Pundt A. (2004), Adhesion energy between metal films and polymers obtained by studying buckling induced by hydrogen, Acta Materialia, 52, 1579. ; Mylvaganam K. (2003), Residual stress induced atomic scale buckling of diamond carbon coatings on silicon substrate, Thin Solid Films, 425, 145.