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Abstract

In this paper the problem of resistance measurement of ultrathin conductive lines on dielectric substrates dedicated for printing electronic industry is discussed. The measured line is transformed in a non-invasive way into a resonance circuit. By using a magnetic coupling between the source line and the tested line, the resistance measurement can be performed non-invasively, i:e. without a mechanical contact. The proposed contactless resistance measurement method is based on the resonance quality factor estimation and it is an example of the inverse problem in metrology.

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Authors and Affiliations

Krzysztof Szybiński

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