Details

Title

Structure and Electrical Resistivity Dependence of Molybdenum Thin Films Deposited by DC Modulated Pulsed Magnetron Sputtering

Journal title

Archives of Metallurgy and Materials

Yearbook

2018

Volume

vol. 63

Numer

No 3

Authors

Keywords

magnetron sputtering ; modulated pulse magnetron sputtering ; plasma&films characterization

Divisions of PAS

Nauki Techniczne

Coverage

1339-1344

Publisher

Institute of Metallurgy and Materials Science of Polish Academy of Sciences ; Commitee on Metallurgy of Polish Academy of Sciences

Date

2018.10.10

Type

Artykuły / Articles

Identifier

ISSN 1733-3490

DOI

10.24425/123809

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