In modern microelectronics progress has been made towards low power ultra large-scale integration (ULSI), and nano-structure devices such as single electron transistors and quantum dots. In this technology application of new materials, which includes high-κ dielectrics for the MOSFET transistors, with extraordinary purity and uniformity is required. Failure analysis and reliability investigations of such films very often requires highresolution local measurements of electrical surface parameters. This kind of experiments can be performed using conductive atomic force microscopy, which provides simultaneous measurement of surface topography and current ?owing through the investigated layer. In order to acquire reliable data, there was designed a precise measurement and control system, which included a low-noise current-to-voltage converter of picoampere resolution, a scanning stage with control electronics and a data acquisition system. In the paper we describe the architecture of the designed and applied experimental set-up. We also present results of simultaneous measurements of topography and current on gold and highly oriented pyrolytic graphite (HOPG).
The paper contains the results of the initial surface treatment influence on the properties of the medical Ti-6Al-7Nb alloy with a modified zirconium oxide layer deposited on its surface by sol-gel method. In the paper, the analysis of results of potentiodynamic studies is presented as well as its resistance to pitting corrosion and electrochemical impedance spectroscopy (EIS), macroscopic observation of the surface of samples and analysis of geometrical structure with the use Atomic Force Microscope (AFM) were performed. The studies were performed on two groups of samples depending on the graduation of the sand used in sandblasted process – 50 μm and 250 μm. Based on the obtained results it can be concluded that the type of the initial surface treatment preceding the surface modification of the Ti-6Al-7Nb has a significant effect on its properties.
Scanning probe microscopy (SPM) since its invention in the 80’s became very popular in examination of many different sample parameters, both in university and industry. This was the effect of bringing this technology closer to the operator. Although the ease of use opened a possibility for measurements without high labour requirement, a quantitative analysis is still a limitation in Scanning ProbeMicroscopes available on the market. Based on experience of Nano-metrology Group, SPM still can be considered as a tool for quantitative examination of thermal, electrical and mechanical surface parameters. In this work we present an ARMScope platform as a versatile SPM controller that is proved to be useful in a variety of applications: fromatomic-resolution STM (Scanning TunnellingMicroscopy) toMulti-resonance KPFM (Kelvin Probe force microscopy) to commercial SEMs (Scanning electron microscopes).
The paper presents the influence of ZrO2 coating on Ti6Al7Nb titanium alloy depending on the method of deposition. The coatings were made by sol-gel method and atomic layer deposition (ALD). Wettability tests, pitting corrosion assessment and electrochemical impedance spectroscopy (EIS) were carried out in the paper. Complementary macro- and microscopic observations, roughness analysis by profilometric method and atomic force microscopy (AFM) were made. Based on the results obtained, it can be concluded that the type of method of depositing the layer on the surface of the material has a significant influence on its properties and that it should be taken into account during the process of the material improvement. Drawing on the findings presented, it can be inferred that roughness has a significant impact upon the surface wetttability of the tested surfaces and their related corrosion resistance. The obtainment of hydrophobic surfaces is for smaller rougidity values.
Silicate coatings have been considered as an alternative to toxic and carcinogenic other chemical treatments. In this paper, a strengthened silicate coating was formed on the surface of low carbon steel by dip immersion method. The modification and strengthening was done by loading colloidal nano-SiO2 into the film. The characterizations of nano-SiO2 were investigated by FESEM, TEM and FT-IR. The effects of nano contents (weight ratio) and drying temperatures on corrosion properties of silicate film were studied. Potentiodynamic polarization, electrochemical impedance spectroscopy and immersion tests have been used to study corrosion behavior of nano-loaded silicate films. Surface morphology, microstructure and its chemical composition were analyzed by means of FESEM, EDS, AFM, XRD, GIXRD, ATR-FTIR and Raman techniques. Results indicated that colloidal nano-SiO2 properly modified the silicate coatings and significantly improved the corrosion resistance and barrier property. Also drying temperature showed a considerable effect in silicate coating and higher corrosion resistance was obtained with 150°C curing.