Details

Title

Conductive atomic force microscope for investigation of thin-film gate insulators

Journal title

Bulletin of the Polish Academy of Sciences: Technical Sciences

Yearbook

2008

Volume

vol. 56

Issue

No 1

Authors

Keywords

AFM ; conductive probe ; thin-film oxides annealing

Divisions of PAS

Nauki Techniczne

Coverage

39-44

Date

2008

Type

Artykuły / Articles

Identifier

ISSN 2300-1917

Source

Bulletin of the Polish Academy of Sciences: Technical Sciences; 2008; vol. 56; No 1; 39-44
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