Details Details PDF BIBTEX RIS Title The Al2O3/TiO2 double antireflection coating deposited by ALD method Journal title Opto-Electronics Review Yearbook 2022 Volume 30 Issue 3 Authors Szindler, Marek ; Szindler, Magdalena M. ; Orwat, Justyna ; Kulesza-Matlak, Grażyna Affiliation Szindler, Marek : Scientific and Didactic Laboratory of Nanotechnology and Material Technologies, Faculty of Mechanical Engineering, Silesian University of Technology, 7 Towarowa St., 44-100 Gliwice, Poland ; Szindler, Magdalena M. : Department of Engineering Materials and Biomaterials, Silesian University of Technology, 18a Konarskiego St., 44-100 Gliwice, Poland ; Orwat, Justyna : Department of Mining, Safety Engineering and Industrial Automation, Silesian University of Technology, 2 Akademicka St., 44-100 Gliwice, Poland ; Kulesza-Matlak, Grażyna : Institute of Metallurgy and Materials Science of Polish Academy of Sciences, 25 Reymonta St., 30-059 Krakow, Poland Keywords antireflection coating ; atomic layer deposition method ; solar cells Divisions of PAS Nauki Techniczne Coverage e141952 Publisher Polish Academy of Sciences (under the auspices of the Committee on Electronics and Telecommunication) and Association of Polish Electrical Engineers in cooperation with Military University of Technology Date 27.09.2022 Type Article Identifier DOI: 10.24425/opelre.2022.141952