Title

Multi-technique characterisation of InAs-on-GaAs wafers with circular defect pattern

Journal title

Opto-Electronics Review

Yearbook

2023

Volume

31

Issue

special issue

Affiliation

Boguski, Jacek : Institute of Applied Physics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland ; Wróbel, Jarosław : Institute of Applied Physics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland ; Złotnik, Sebastian : Institute of Applied Physics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland ; Budner, Bogusław : Institute of Optoelectronics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland ; Liszewska, Malwina : Institute of Optoelectronics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland ; Kubiszyn, Łukasz : VIGO Photonics S.A., Poznańska 129/133, 05-850 Ożarów Mazowiecki, Poland ; Michałowski, Paweł P. : Institute of Optoelectronics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland ; Ciura, Łukasz : Department of Electronics Fundamentals, Rzeszów University of Technology, W. Pola 12, 35-959 Rzeszów, Poland ; Moszczyński, Paweł : Institute of Computer and Information Systems, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland ; Odrzywolski, Sebastian : Institute of Applied Physics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland ; Jankiewicz, Bartłomiej : Institute of Optoelectronics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland ; Wróbel, Jerzy : Institute of Applied Physics, Military University of Technology, gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland ; Wróbel, Jerzy : Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, 02-668 Warsaw, Poland

Authors

Boguski, Jacek ; Wróbel, Jarosław ; Złotnik, Sebastian ; Budner, Bogusław ; Liszewska, Malwina ; Kubiszyn, Łukasz ; Michałowski, Paweł P. ; Ciura, Łukasz ; Moszczyński, Paweł ; Odrzywolski, Sebastian ; Jankiewicz, Bartłomiej ; Wróbel, Jerzy

Keywords

wafer homogeneity ; wafer defect pattern ; surface roughness ; indium arsenide ; beryllium doping

Divisions of PAS

Nauki Techniczne

Coverage

e144564

Publisher

Polish Academy of Sciences (under the auspices of the Committee on Electronics and Telecommunication) and Association of Polish Electrical Engineers in cooperation with Military University of Technology

Date

24.02.2023

Type

Article

Identifier

DOI: 10.24425/opelre.2023.144564